Silicon micro-resonance type accelerometer



The invention discloses a silicon micro-resonant type accelerometer, comprising an upper layer part of the accelerometer formed on the single crystal silicon and a lower layer part of the signal line formed on the glass substrate. The upper layer mechanical structure of the accelerometer is composed of a mass block, a pair of identical resonators and bars. The resonators are vertically and symmetrically disposed in the middle of the mass block. One end of the resonator is connected with the fixed baseplate and another end of the resonator is connected with the mass block by the bar and the mass block is connected with the fixed baseplates by four folded beams. The fixed baseplate is mounted on the fixed basedplate bonding points on the glass substrate, therefore the mechanical structure of the upper layer is hang in the air above the glass substrate of the lower layer. The silicon micro-resonant type accelerometer has features: high sensitivity, good stability and strong resistance to shock.




Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)


Cited By (9)

    Publication numberPublication dateAssigneeTitle
    CN-101858927-AOctober 13, 2010南京理工大学Low-stress silicon micro resonance type accelerometer
    CN-101858927-BMay 09, 2012南京理工大学低应力硅微谐振式加速度计
    CN-101858931-AOctober 13, 2010南京理工大学Frame type capacitive silicon micromechanical accelerometer
    CN-101963624-AFebruary 02, 2011南京理工大学Silicon micro-resonant accelerometer
    CN-101963624-BSeptember 12, 2012南京理工大学硅微谐振式加速度计
    CN-102109534-AJune 29, 2011南京理工大学Two-axis resonant silicon micro-accelerometer
    CN-102109534-BSeptember 05, 2012南京理工大学双轴谐振式硅微加速度计
    CN-102243251-ANovember 16, 2011东南大学Micromechanical silicon resonant accelerometer with different resonant frequencies
    CN-103278660-ASeptember 04, 2013南京信息工程大学一种差分谐振式微加速度计及其驱动方法