Silicon micro-resonance type accelerometer

硅微谐振式加速度计

Abstract

本发明公开了一种硅微谐振式加速度计,它由制作在单晶硅片上的加速度计结构的上层部分和制作在玻璃衬底上的信号线的下层部分所组成,加速度计上层机械结构由质量块、一对完全相同的谐振器和杠杠组成,谐振器上下对称布置在质量块的中间,谐振器的一端与固定基座连接,另一端通过杠杠与质量块连接,质量块通过四根折叠梁与其四角的固定基座连接,该固定基座安装在玻璃衬底上的固定基座键合点上,使上层的机械结构部分悬空在下层的玻璃衬底部分之上。本发明是一种具有灵敏度高、稳定性好和抗冲击能力强的硅微谐振式加速度计。
The invention discloses a silicon micro-resonant type accelerometer, comprising an upper layer part of the accelerometer formed on the single crystal silicon and a lower layer part of the signal line formed on the glass substrate. The upper layer mechanical structure of the accelerometer is composed of a mass block, a pair of identical resonators and bars. The resonators are vertically and symmetrically disposed in the middle of the mass block. One end of the resonator is connected with the fixed baseplate and another end of the resonator is connected with the mass block by the bar and the mass block is connected with the fixed baseplates by four folded beams. The fixed baseplate is mounted on the fixed basedplate bonding points on the glass substrate, therefore the mechanical structure of the upper layer is hang in the air above the glass substrate of the lower layer. The silicon micro-resonant type accelerometer has features: high sensitivity, good stability and strong resistance to shock.

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Cited By (9)

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    CN-101858927-AOctober 13, 2010南京理工大学Low-stress silicon micro resonance type accelerometer
    CN-101858927-BMay 09, 2012南京理工大学低应力硅微谐振式加速度计
    CN-101858931-AOctober 13, 2010南京理工大学Frame type capacitive silicon micromechanical accelerometer
    CN-101963624-AFebruary 02, 2011南京理工大学Silicon micro-resonant accelerometer
    CN-101963624-BSeptember 12, 2012南京理工大学硅微谐振式加速度计
    CN-102109534-AJune 29, 2011南京理工大学Two-axis resonant silicon micro-accelerometer
    CN-102109534-BSeptember 05, 2012南京理工大学双轴谐振式硅微加速度计
    CN-102243251-ANovember 16, 2011东南大学Micromechanical silicon resonant accelerometer with different resonant frequencies
    CN-103278660-ASeptember 04, 2013南京信息工程大学一种差分谐振式微加速度计及其驱动方法